Gold and silicon, the material of your wafers, form an eutectic bond. Why use an adhesion layer, when you could take advantage of the eutectic temperature (363 C if I recall correctly) and save on the thickness of the gold layer? On 3/1/11, khan waseemwrote: > Qader - what type of information do you need? did you try the way people do > cu - cu bonding? > > --- On Sun, 2/13/11, Abdul Qader Ahsan Qureshi wrote: > > From: Abdul Qader Ahsan Qureshi > Subject: [mems-talk] Silver to Silver Thermocompressive Bonding > To: mems-talk@memsnet.org > Date: Sunday, February 13, 2011, 11:16 PM > > For my Current research work I’m using Gold to Gold Thermocompressive > bonding for silicon wafer. For this purpose both wafers have been oxidized > and successively coated with a seed layer of chrome/gold and then plated > uniformly with a thick gold layer Final aim is to stack multiple Silicon > wafer by using gold as an intermediate Layer. > > But I’m also interested to use Silver instead of Gold. I’ll appreciate if > someone can provide information on Silver to Silver Thermocompressive > bonding.