Dear All, I am trying to use LOR 5A for release of SU 8 sheets. It worked fine with single patterning of SU8. Recently I tried to use it for releasing SU 8 which is double patterned, but it did not released SU 8. Could it be that because of two post bakes that it is not releasing SU 8? I pattern SU 8 (around 50um) and then after 3-4 hours (because of overnight exposure with a laser), post bake it according to specifications given by microchem. Then I expose it again and post bake immediately. Develop it after atleast 4 hours. Has any one had any experience on this? Any help is much appreciated. Thanks a lot in advace! Kind Regards, Sumit