Hi, Have you used Contact Lithography? Then may be there was some gap between your mask and the substrate. Also what process parameters have you used? It can also be because of under- exposure. ________________________________ From: Xiaohui LinTo: General MEMS discussion Sent: Wednesday, November 16, 2011 8:36 PM Subject: [mems-talk] SU8_2005 tailing at foot https://lh6.googleusercontent.com/-svOBwLQuAXk/TsRyKCq3HqI/AAAAAAAAACM/Y07BUFTq6 ok/s912/SU8_2005_1114_onSi_10s09.jpg Hi : I am processing SU8 2005 on Silicon. But the shape is not what I expected. There are tailing towards the trench at the foot the SU8, as the picture shown in the link above. Could anyone suggest what I can do to eliminate the tailing? Thanks