Yes, this is very easy to solve. Please use a i-line filter in your mask
aligner. That's it.

-----邮件原件-----
发件人: mems-talk-bounces+l.gong=suss.com.cn@memsnet.org [mailto:mems-talk-
bounces+l.gong=suss.com.cn@memsnet.org] 代表 gau s
发送时间: 2011年11月19日 12:08
收件人: General MEMS discussion; Xiaohui Lin
主题: Re: [mems-talk] SU8_2005 tailing at foot

Hi,

Have you used Contact Lithography?

Then may be there was some gap between your mask and the substrate.

Also what process parameters have you used? It can also be because of under-
exposure.