durusmail: mems-talk: Low temperature Al-Al bonding
Low temperature Al-Al bonding
2012-02-03
2012-02-06
2012-02-07
2012-02-07
Low temperature Al-Al bonding
Pietro Maoddi
2012-02-07
Hello,

I considered that option but it seems a little homebrew: the SB6 alignment
jig  is kind of delicate
and not fit for putting weights on it (the wafers are clamped in the center
of a ring), so I would have to somehow remove the wafers from the jig
without losing alignment to put them in an oven.

That's why I'm looking for a more "industrial" technique.

Best,
Pietro
2012/2/6 Matthieu Nannini, Dr. 

> Why don't you do your original idea but after alignment instead of using
> the bonder, use a regular oven with a weight ?
>
> Matthieu
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