I am interested in using a metal as an etch stop for a dry etch of Silicon Nitride, and I am looking for the following: 1) Can a metal be used as an etch stop for dry etching of PECVD Si3N4; if so, which metals? 2) Does PECVD Si3N4 on metal adhere, grow, hermetically seal, and stay structurally sound under bending load? Supporting literature is very much appreciated! Additional Process Details 1) LPCVD Si3N4 2) A metal 3) PECVD Si3N4 4) ICP Etch of PECVD layer down to the metal Thank you in advance for your help, Kipp Scheonwald _______________________________________________ Hosted by the MEMS and Nanotechnology Exchange, the country's leading provider of MEMS and Nanotechnology design and fabrication services. Visit us at http://www.mems-exchange.org Want to advertise to this community? See http://www.memsnet.org To unsubscribe: http://mail.mems-exchange.org/mailman/listinfo/mems-talk