So HDMS+SU8 or HDMS+omnicoat+SU8?
did you bake the HDMS before SU8 spinning?
On Wed, Mar 7, 2012 at 2:00 PM, Kipp Schoenwald
wrote:
> HMDS has worked for me on both Pyrex and Quartz. I suspect it should work
> on glass just as well.
>
> Kipp
>
> On Tue, Mar 6, 2012 at 4:37 PM, Xiaohui Lin >wrote:
>
> > hi all:
> >
> > Could any one suggest how to improve the adhesion of SU8 2005 to glass
> > or quartz?
> >
> > I tried glass+omnicoat+SU8, it is week. I also tried
> > quartz+omnicoat+SU8 , but still peel off when I put in plating solution
> > (pH=5).
> >
> > Will HMDS work? or other adhesion promoter?
> >
> > thanks
> > _______________________________________________
> > Hosted by the MEMS and Nanotechnology Exchange, the country's leading
> > provider of MEMS and Nanotechnology design and fabrication services.
> > Visit us at http://www.mems-exchange.org
> >
> > Want to advertise to this community? See http://www.memsnet.org
> >
> > To unsubscribe:
> > http://mail.mems-exchange.org/mailman/listinfo/mems-talk
> >
>
>
>
> --
> _______________________________________________
> Hosted by the MEMS and Nanotechnology Exchange, the country's leading
> provider of MEMS and Nanotechnology design and fabrication services.
> Visit us at http://www.mems-exchange.org
>
> Want to advertise to this community? See http://www.memsnet.org
>
> To unsubscribe:
> http://mail.mems-exchange.org/mailman/listinfo/mems-talk
>
--
Lin, Xiaohui
Ph.D. Program in Electrical and Computer Engineering
Nanophotonics and Optical Interconnects Group
Microelectronics Research Center
The University of Texas at Austin
E-mail: xiaohui.lin@mail.utexas.edu
Office: (512) 471-4349
_______________________________________________
Hosted by the MEMS and Nanotechnology Exchange, the country's leading
provider of MEMS and Nanotechnology design and fabrication services.
Visit us at http://www.mems-exchange.org
Want to advertise to this community? See http://www.memsnet.org
To unsubscribe:
http://mail.mems-exchange.org/mailman/listinfo/mems-talk