durusmail: mems-talk: Sol gel spin-coating of manganites oxide thin film on Si(100)-substrate
Sol gel spin-coating of manganites oxide thin film on Si(100)-substrate
2012-09-05
sudharshan v
2012-09-05
Gong Li
Sol gel spin-coating of manganites oxide thin film on Si(100)-substrate
sudharshan v
2012-09-05
Hi all,

We've been struggling sol-gel oxides thin film on Si(100) substrate by spin
coating.
Is this sol-gel spin coating technique suitable for microelectronics?
Any tips or suggestions would be greatly appreciated.

Thank you
Sudharshan
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