durusmail: mems-talk: Sol gel spin-coating of manganites oxide thin film on Si(100)-substrate
Sol gel spin-coating of manganites oxide thin film on Si(100)-substrate
2012-09-05
sudharshan v
2012-09-05
Gong Li
Sol gel spin-coating of manganites oxide thin film on Si(100)-substrate
Gong Li
2012-09-05
Yes, sol gel resist can be used for nano imprinting technology for fine
structures done to 50 nm, even smaller.

-----邮件原件-----
发件人: mems-talk-bounces+l.gong=suss.com.cn@memsnet.org
[mailto:mems-talk-bounces+l.gong=suss.com.cn@memsnet.org] 代表 sudharshan v
发送时间: 2012年9月5日 23:52
收件人: General MEMS discussion
主题: [mems-talk] Sol gel spin-coating of manganites oxide thin film on
Si(100)-substrate

Hi all,

We've been struggling sol-gel oxides thin film on Si(100) substrate by spin
coating.
Is this sol-gel spin coating technique suitable for microelectronics?
Any tips or suggestions would be greatly appreciated.

Thank you
Sudharshan
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