Yes, sol gel resist can be used for nano imprinting technology for fine structures done to 50 nm, even smaller. -----邮件原件----- 发件人: mems-talk-bounces+l.gong=suss.com.cn@memsnet.org [mailto:mems-talk-bounces+l.gong=suss.com.cn@memsnet.org] 代表 sudharshan v 发送时间: 2012年9月5日 23:52 收件人: General MEMS discussion 主题: [mems-talk] Sol gel spin-coating of manganites oxide thin film on Si(100)-substrate Hi all, We've been struggling sol-gel oxides thin film on Si(100) substrate by spin coating. Is this sol-gel spin coating technique suitable for microelectronics? Any tips or suggestions would be greatly appreciated. Thank you Sudharshan _______________________________________________ Hosted by the MEMS and Nanotechnology Exchange, the country's leading provider of MEMS and Nanotechnology design and fabrication services. Visit us at http://www.mems-exchange.org Want to advertise to this community? See http://www.memsnet.org To unsubscribe: http://mail.mems-exchange.org/mailman/listinfo/mems-talk _______________________________________________ Hosted by the MEMS and Nanotechnology Exchange, the country's leading provider of MEMS and Nanotechnology design and fabrication services. Visit us at http://www.mems-exchange.org Want to advertise to this community? See http://www.memsnet.org To unsubscribe: http://mail.mems-exchange.org/mailman/listinfo/mems-talk