durusmail: mems-talk: Easiest way to 'silanize' or prepare master for soft-lithography?
Easiest way to 'silanize' or prepare master for soft-lithography?
2012-11-18
Nathan McCorkle
2012-11-19
Kevin Nichols
2012-11-20
Nathan McCorkle
Easiest way to 'silanize' or prepare master for soft-lithography?
Nathan McCorkle
2012-11-18
Looking at the soft lithography for microfluidics literature, they mention
silanizing the silicon or SU-8 master with some long-name gas. Is there a
chemical hood method, as the plasma chamber I have access to is for air or
oxygen only.

I'm guessing this silanization layer bonds to the master less than PDMS
curing against the master would?

--
-Nathan
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