Dear Li,
Yes! i mean round corners. I haven't tried with BHF. with HF i achieved 200µm
depth channels, will it make sense if I do BHF after HF etching ?
regards,Fahd




> From: t.li@primewafers.com
> To: mems-talk@memsnet.org
> Date: Tue, 4 Dec 2012 23:41:26 +0100
> Subject: Re: [mems-talk] etched glass
>
> I mean, after your etch, just to round the corners.
>
> Prime Wafers
>
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