I used only chrome with some oxide layer (just a low reflectivity chrome
mask blank) precoated with 0.5um AZ resist.
This was the cheapest and quickest option which is probably fine for most
purposes but some de-lamination and poor quality at the channel edge is the
downside. Cr/Au with a nice thick hard-baked resist is probably the best
method for high quality channels.


On 6 December 2012 14:49, Kuijpers, Peter wrote:

> Goodmorning,
>
> I was wondering what kind of mask was used to etch the glass in HF?
> Is het Cr or Cr/Au?
>
> best regards,
>
> Peter Kuijpers
> Senior Process Integrator
> Philips Innovation Services
> MiPlaza/TL group
> High Tech Campus 04-p4.20
> 5656 AE Eindhoven
> The Netherlands
> Phone: +31 402798904
> Mobile:+31 612507027,
> Email: p.e.m.kuijpers@philips.com
>
> www.innovationservices.philips.com
>
>
> -----Original Message-----
> From: mems-talk-bounces+p.e.m.kuijpers=philips.com@memsnet.org [mailto:
> mems-talk-bounces+p.e.m.kuijpers=philips.com@memsnet.org] On Behalf Of
> Fahd Ali
> Sent: Wednesday 5 December 2012 16:41
> To: mems-talk@memsnet.org
> Subject: Re: [mems-talk] etched glass
>
>
>
> Hi Nadim,
> I used HF to achieve high depth of the channels 200µm. does buffered oxide
> etchant can also give same result ?
>
> regards,Fahad
>
>
>
>
> > Date: Tue, 4 Dec 2012 18:16:34 -0300
> > From: nadimest@gmail.com
> > To: mems-talk@memsnet.org
> > Subject: Re: [mems-talk] etched glass
> >
> > Dear Fahad. Pure HF is very agressive to glass. You should use a
> > buffered oxide etchant based in ammonium fluoride. There are plenty of
> > recipes out there. Give it a try...
> >
> > Best regards
> >
> > Nadim
> > El 04/12/2012 20:48, "Fahd Ali"  escribió:
> >
> > >
> > > Hi,
> > >
> > > I have problem regarding glass etching. I made micro-channels using
> > > HF-40% on glass wafers. The problem is I have very sharp edges,
> > > which is not surprising. But for my application I need smooth edges.
> > >
> > > Is there any way during etching or after ?
> > > your answers are highly appreciated.
> > >
> > > regards,
> > > Fahad
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