durusmail: mems-talk: AFM Cantilever Fab. Sequence
AFM Cantilever Fab. Sequence
2013-01-08
2013-01-08
AFM Cantilever Fab. Sequence
Michael Martin
2013-01-08
Hi,
  We are looking for an inexpensive, non-proprietary fabrication sequence
for producing a generic version of an AFM cantilever. The literature is
rife with fabrication sequences but it is hard to find one that might be
effectively used as a generic cantilever platform.  The ideal would result
in AFM tips that could be subsequently modified for a number of specialty
applications.  Can anyone provide some guidance or a good reference to a
nice review article?

Cheers,
  Michael
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