durusmail: mems-talk: AFM Cantilever Fab. Sequence
AFM Cantilever Fab. Sequence
2013-01-08
2013-01-08
AFM Cantilever Fab. Sequence
Bill Moffat
2013-01-08
Michael if your AFM cantilever needs anti-stiction treatment let us know. Bill
Moffat YES.

-----Original Message-----
From: mems-talk-bounces+bmoffat=yieldengineering.com@memsnet.org [mailto:mems-
talk-bounces+bmoffat=yieldengineering.com@memsnet.org] On Behalf Of Michael
Martin
Sent: Tuesday, January 08, 2013 12:27 PM
To: General MEMS discussion
Subject: [mems-talk] AFM Cantilever Fab. Sequence

Hi,
  We are looking for an inexpensive, non-proprietary fabrication sequence for
producing a generic version of an AFM cantilever. The literature is rife with
fabrication sequences but it is hard to find one that might be effectively used
as a generic cantilever platform.  The ideal would result in AFM tips that could
be subsequently modified for a number of specialty applications.  Can anyone
provide some guidance or a good reference to a nice review article?

Cheers,
  Michael
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