Hi Andrea, Much of your design will depend on the temperatures you would like to reach. What type of sensor will this be, e.g. metal oxide, chemo-capacitor, chemo-resistor? Hot plates on the micro-scale can be tricky to properly thermally isolate so that a uniform target temperature is reached with a reasonable power budget and time constant. For low temperature hotplates (<325 deg C) we have had good luck with low stress polyimides as the heater support material though for higher temperatures you will need a material like stress compensated silicon nitride (or carbide). I can provide references depending on which variety you are interested in. Cheers, Michael On Thu, Jan 17, 2013 at 1:39 PM, Andrea Mazzolariwrote: > Good morning, > i'm interested to learn about fabrication processes of micro hot plates, > typically used in gas sensing. > Any advice on the most advances silicon micromachining processes and > technology used for micro hot plates fabrication ? > > Best regards, > Andrea > > > > _______________________________________________ > Hosted by the MEMS and Nanotechnology Exchange, the country's leading > provider of MEMS and Nanotechnology design and fabrication services. > Visit us at http://www.mems-exchange.org > > Want to advertise to this community? See http://www.memsnet.org > > To unsubscribe: > http://mail.mems-exchange.org/mailman/listinfo/mems-talk > _______________________________________________ Hosted by the MEMS and Nanotechnology Exchange, the country's leading provider of MEMS and Nanotechnology design and fabrication services. Visit us at http://www.mems-exchange.org Want to advertise to this community? See http://www.memsnet.org To unsubscribe: http://mail.mems-exchange.org/mailman/listinfo/mems-talk