Dear all,

Hello,

 I am also interested in this topic. I need to fabricate micro heaters as
hot_spots (low temperature heater) but I could not find a coherent source
about the design parameters, possible materials and technologies and
the necessary characterizations. I appreciate your help in finding
references.

Best,
Hamideh

On Fri, Jan 18, 2013 at 3:43 PM, Michael Martin <
michael.martin@themicrowerks.com> wrote:

> Hi Andrea,
>     Much of your design will depend on the temperatures you would like to
> reach.  What type of sensor will this be, e.g. metal oxide,
> chemo-capacitor, chemo-resistor?  Hot plates on the micro-scale can be
> tricky to properly thermally isolate so that a uniform target temperature
> is reached with a reasonable power budget and time constant.  For low
> temperature hotplates (<325 deg C) we have had good luck with low stress
> polyimides as the heater support material though for higher temperatures
> you will need a material like stress compensated silicon nitride (or
> carbide).  I can provide references depending on which variety you are
> interested in.
>
> Cheers,
>    Michael
>
>
> On Thu, Jan 17, 2013 at 1:39 PM, Andrea Mazzolari  >wrote:
>
> > Good morning,
> > i'm interested to learn about fabrication processes of micro hot plates,
> > typically used in gas sensing.
> > Any advice on the most advances silicon micromachining processes and
> > technology used for micro hot plates fabrication ?
> >
> > Best regards,
> > Andrea
> >
> >
> >
> > _______________________________________________
> > Hosted by the MEMS and Nanotechnology Exchange, the country's leading
> > provider of MEMS and Nanotechnology design and fabrication services.
> > Visit us at http://www.mems-exchange.org
> >
> > Want to advertise to this community?  See http://www.memsnet.org
> >
> > To unsubscribe:
> > http://mail.mems-exchange.org/mailman/listinfo/mems-talk
> >
> _______________________________________________
> Hosted by the MEMS and Nanotechnology Exchange, the country's leading
> provider of MEMS and Nanotechnology design and fabrication services.
> Visit us at http://www.mems-exchange.org
>
> Want to advertise to this community?  See http://www.memsnet.org
>
> To unsubscribe:
> http://mail.mems-exchange.org/mailman/listinfo/mems-talk
>
_______________________________________________
Hosted by the MEMS and Nanotechnology Exchange, the country's leading
provider of MEMS and Nanotechnology design and fabrication services.
Visit us at http://www.mems-exchange.org

Want to advertise to this community?  See http://www.memsnet.org

To unsubscribe:
http://mail.mems-exchange.org/mailman/listinfo/mems-talk