All,

At MiPlaza we found that reducing the exposure energy
fixed this issue.

Best regards,

Peter Kuijpers
Development Engineer Thin Film
Philips Innovation Services
MiPlaza/TL group
High Tech Campus 04-p4.20
5656 AE Eindhoven
The Netherlands
Phone: +31 402798904
Mobile:+31 612507027,
Email: p.e.m.kuijpers@philips.com

www.innovationservices.philips.com


-----Original Message-----
From: mems-talk-bounces+p.e.m.kuijpers=philips.com@memsnet.org [mailto:mems-
talk-bounces+p.e.m.kuijpers=philips.com@memsnet.org] On Behalf Of Diane Atkinson
Sent: Monday 25 February 2013 16:44
To: mems-talk@memsnet.org
Subject: [mems-talk] Thin SU8 footing issues

Hello,
       I am trying to process 4um of SU8 3005,and am having issues with the
footing at the bottom of my pattern, I t is about 1-1.5 microns. I have tried
several things and nothing seem to fix this problem, I am about to try CEM, but
am wondering if there is an alternative way to prevent this ,maybe reduce the
PEB ?  Thank you _______________________________________________
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_______________________________________________
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