Thank you for your suggestion, I will have to try that- diane -----Original Message----- From: mems-talk-bounces+diane.atkinson=stcmems.com@memsnet.org [mailto:mems- talk-bounces+diane.atkinson=stcmems.com@memsnet.org] On Behalf Of Kuijpers, Peter Sent: Tuesday, February 26, 2013 1:56 AM To: General MEMS discussion Subject: Re: [mems-talk] Thin SU8 footing issues All, At MiPlaza we found that reducing the exposure energy fixed this issue. Best regards, Peter Kuijpers Development Engineer Thin Film Philips Innovation Services MiPlaza/TL group High Tech Campus 04-p4.20 5656 AE Eindhoven The Netherlands Phone: +31 402798904 Mobile:+31 612507027, Email: p.e.m.kuijpers@philips.com www.innovationservices.philips.com -----Original Message----- From: mems-talk-bounces+p.e.m.kuijpers=philips.com@memsnet.org [mailto:mems- talk-bounces+p.e.m.kuijpers=philips.com@memsnet.org] On Behalf Of Diane Atkinson Sent: Monday 25 February 2013 16:44 To: mems-talk@memsnet.org Subject: [mems-talk] Thin SU8 footing issues Hello, I am trying to process 4um of SU8 3005,and am having issues with the footing at the bottom of my pattern, I t is about 1-1.5 microns. I have tried several things and nothing seem to fix this problem, I am about to try CEM, but am wondering if there is an alternative way to prevent this ,maybe reduce the PEB ? Thank you _______________________________________________ Hosted by the MEMS and Nanotechnology Exchange, the country's leading provider of MEMS and Nanotechnology design and fabrication services. Visit us at http://www.mems-exchange.org Want to advertise to this community? See http://www.memsnet.org To unsubscribe: http://mail.mems-exchange.org/mailman/listinfo/mems-talk ________________________________ The information contained in this message may be confidential and legally protected under applicable law. The message is intended solely for the addressee(s). If you are not the intended recipient, you are hereby notified that any use, forwarding, dissemination, or reproduction of this message is strictly prohibited and may be unlawful. If you are not the intended recipient, please contact the sender by return e-mail and destroy all copies of the original message. _______________________________________________ Hosted by the MEMS and Nanotechnology Exchange, the country's leading provider of MEMS and Nanotechnology design and fabrication services. Visit us at http://www.mems-exchange.org Want to advertise to this community? See http://www.memsnet.org To unsubscribe: http://mail.mems-exchange.org/mailman/listinfo/mems-talk _______________________________________________ Hosted by the MEMS and Nanotechnology Exchange, the country's leading provider of MEMS and Nanotechnology design and fabrication services. Visit us at http://www.mems-exchange.org Want to advertise to this community? See http://www.memsnet.org To unsubscribe: http://mail.mems-exchange.org/mailman/listinfo/mems-talk