Dear MEMS community Our lab has been thinking about acquiring a chemical mechanical polishing tool. We are tight in budget so I'm wondering what would be an economical solution. Would it be possible for us to build one ourselves? What caveats do we need to look for if we are looking for a second-hand one? We are interested in planarizing photoresist (with plated metal) and silicon primarily. We typically process small pieces of samples (1in^2 or so) and seldom do full wafers. Many thanks. Leo -- Xiaoguang "Leo" Liu Assistant Professor Electrical and Computer Engineering, Davis MM-Wave Research Center University of California, Davis 3169 Kemper Hall, One Shields Avenue, Davis, CA, 95616 lxgliu@ucdavis.edu http://ucdart.net _______________________________________________ Hosted by the MEMS and Nanotechnology Exchange, the country's leading provider of MEMS and Nanotechnology design and fabrication services. Visit us at http://www.mems-exchange.org Want to advertise to this community? See http://www.memsnet.org To unsubscribe: http://mail.mems-exchange.org/mailman/listinfo/mems-talk