Hi, guys, Where can I get a RIE dry etch condition for Si nano pattern etching? I used normal condition such as CHF3 or SF6, 80W RIE power and 20 mTorr for the etching, but my nano patterned Cr mask was totally destroyed. BTW, if I want to have a little bit vertical (not so vertical, I can accept some undercut) sidewall for 2 um Si trench ( 2um depth), can normal RIE (not ICP) been used for this etching? If you have some experience, please kindly share me some tricks. Thanks. Best regards. Charles Dept. of Electronic Engineering City University of Hong Kong 83 Tat Chee Avenue, Kowloon, Hong Kong tqyhappy@ymail.com _______________________________________________ Hosted by the MEMS and Nanotechnology Exchange, the country's leading provider of MEMS and Nanotechnology design and fabrication services. Visit us at http://www.mems-exchange.org Want to advertise to this community? See http://www.memsnet.org To unsubscribe: http://mail.mems-exchange.org/mailman/listinfo/mems-talk