There are developable BARCs out there, but they only coat about 60nm. You may have to double coat them. They are removed with developer. -----Original Message----- From: mems-talk-bounces+r-black1=ti.com@memsnet.org [mailto:mems-talk- bounces+r-black1=ti.com@memsnet.org] On Behalf Of Xiao Sent: Wednesday, May 22, 2013 3:14 AM To: mems-talk@memsnet.org Subject: [mems-talk] high viscosity material Hello everyone, I am trying to find a high viscosity material that can fill pores (<100nm) of a substrate, then do patterning with photoresist on it, and removed this material with some solvent or even DI water, but not affecting the photoresist patterns. We have tried several materials for now, but didn't work very well, do you have any ideas of this material? Thank you! Best regards, Xiao _______________________________________________ Hosted by the MEMS and Nanotechnology Exchange, the country's leading provider of MEMS and Nanotechnology design and fabrication services. Visit us at http://www.mems-exchange.org Want to advertise to this community? See http://www.memsnet.org To unsubscribe: http://mail.mems-exchange.org/mailman/listinfo/mems-talk _______________________________________________ Hosted by the MEMS and Nanotechnology Exchange, the country's leading provider of MEMS and Nanotechnology design and fabrication services. Visit us at http://www.mems-exchange.org Want to advertise to this community? See http://www.memsnet.org To unsubscribe: http://mail.mems-exchange.org/mailman/listinfo/mems-talk