durusmail: mems-talk: Bonding LTG:GaAs to SiN?
Bonding LTG:GaAs to SiN?
2014-02-16
2014-02-16
2014-02-16
Bonding LTG:GaAs to SiN?
Antonino Miceli
2014-02-16
Hi all,

We are trying to bond LTG:GaAs to SiN. Does anyone have experience with
this? Any references?
Would an SiO2 adhesion layer help?


We are trying to make a photoconductive switch on a SiN membrane (released
after bonding!).

Thanks,
Nino
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