durusmail: mems-talk: Bonding LTG:GaAs to SiN?
Bonding LTG:GaAs to SiN?
2014-02-16
2014-02-16
2014-02-16
Bonding LTG:GaAs to SiN?
Bill Moffat
2014-02-16
Sorry read the complete email. Once you have plasma bonded you are not going to
be able to release. Bill

Sent from my iPad

On Feb 16, 2014, at 7:26 AM, "Bill Moffat"  wrote:

> If you want to test plasma bonding I can help. Bill Moffat
>
> Sent from my iPad
>
> On Feb 16, 2014, at 6:27 AM, "Antonino Miceli"  wrote:
>
>> Hi all,
>>
>> We are trying to bond LTG:GaAs to SiN. Does anyone have experience with
>> this? Any references?
>> Would an SiO2 adhesion layer help?
>>
>>
>> We are trying to make a photoconductive switch on a SiN membrane (released
>> after bonding!).
>>
>> Thanks,
>> Nino
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