durusmail: mems-talk: SU8 adhesion problems
SU8 adhesion problems
2014-03-10
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SU8 adhesion problems
Janis Klavins
2014-03-10
Hello everybody,

I am trying to coat an SU8 material on ITO etched glass. I have a
problem that during development the SU8 lifts off the glass very easily.
if the glass sheet is immersed in the developer the SU8 lifts off and
floats away.

I believe that this is a baking problem (too much or not enough) after
coating the SU8. I am using a two step kiln 65 degrees ( 1 min)  and 95
degrees (4 min). The same settings for post exposure bake.

Has anyone seen a problem like this?

--
Best regards,
Mr. Janis Klavins
EuroLCDs
Phone: +37163600300
Mobile: +37126141049

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