Hi,

Which SU-8 are you using? SU-8 has problems with adhesion on glass. Try doubling
or tripling your final baking times and increase the exposure by 1,5-2x.

Let us know how it goes,

- João Tiago S. Fernandes, INESC-MN, Lisbon
________________________________
From: Janis Klavins
Sent: ‎10/‎03/‎2014 23:45
To: General MEMS discussion
Subject: [mems-talk] SU8 adhesion problems

Hello everybody,

I am trying to coat an SU8 material on ITO etched glass. I have a
problem that during development the SU8 lifts off the glass very easily.
if the glass sheet is immersed in the developer the SU8 lifts off and
floats away.

I believe that this is a baking problem (too much or not enough) after
coating the SU8. I am using a two step kiln 65 degrees ( 1 min)  and 95
degrees (4 min). The same settings for post exposure bake.

Has anyone seen a problem like this?

--
Best regards,
Mr. Janis Klavins
EuroLCDs
Phone: +37163600300
Mobile: +37126141049

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