Hello all, I have a strange problem with SU8 structures. When we expose and develop the structure it is wider than necessary in SEM image it is possible to see that those wider areas are somehow different and the side of the structure is "fluffy" not straight and even. (see the image below. I believe it might be one of the following: 1) Over-exposure: I cannot change exposure time due to additional adhesion problems 2) Mask is in proximity instead of contact mode: thickness of coating varies by 1 um (I do not think that it should make such a problem) 3) Something wrong in Post-exposure (too long or too hot) Does anyone with greater experience with SU8 could suggest anything? -- Best regards, Mr. Janis Klavins EuroLCDs Phone: +37163600300 Mobile: +37126141049 _______________________________________________ Hosted by the MEMS and Nanotechnology Exchange, the country's leading provider of MEMS and Nanotechnology design and fabrication services. Visit us at http://www.mems-exchange.org Want to advertise to this community? See http://www.memsnet.org To unsubscribe: http://mail.mems-exchange.org/mailman/listinfo/mems-talk