durusmail: mems-talk: Wearing caused contact performance degradation for MEMS devices
Wearing caused contact performance degradation for MEMS devices
2014-08-06
2014-08-06
2014-08-06
Wearing caused contact performance degradation for MEMS devices
Youmin Wang
2014-08-06
Dear ALL,

I am currently working on the wearing caused degradation issue, for a
micromirror device involving the contact of the mirror tip with the landing
base, similar to a RF switch.
As you may know, the contact performance, typically referring to the
release voltage, degrades greatly after large amout of cycles of
contact/release. I am assuming the material exchange or the surface
roughness change are causing this, for which ANSYS simulation of wearing
performance will shed light on the direction for the improvement.
I am just wondering whether anyone of you have used ANSYS for
wearing/roughness change under this topic, and do you have any comments on
my idea of using ANSYS to deal with contact performance degradation?

Thanks.

Youmin Wang
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