durusmail: mems-talk: Removal of silane coating
Removal of silane coating
2014-09-29
2014-09-29
Removal of silane coating
Righeira Carnegie
2014-09-29
Sorry my fault, I also meant for the PMMA removal from PDMS
On Sep 29, 2014 9:59 PM, "Righeira Carnegie"  wrote:

> Organic eater Lol. It does eats like he says, but produces an enormous
> haze. Then the structure collapses. Try giving a silane coating over the
> pdms. Again it might help the cleaning but again if the structures are of
> high ratio, the problems proceeds anyway.
> On Sep 29, 2014 9:30 PM, "Bill Moffat" 
> wrote:
>
>> Any organic eater, Oxygen plasma, peroxide and sulphuric acid. How thick
>> is the silane and what specific silane? Bill Moffat
>>
>> Sent from my iPad
>>
>> > On Sep 29, 2014, at 7:20 AM, "JJ HU"  wrote:
>> >
>> > Hi all,I am wondering if there is way to remove silane/silanization
>> coating from PDMS or glass?
>> > Thank you in advance!
>> > JJ Hu
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