durusmail: mems-talk: Information on Electrochemical Etch Stop Process
Information on Electrochemical Etch Stop Process
Information on Electrochemical Etch Stop Process
Abdul Qader Ahsan Qureshi
2014-11-13
Hello

I want to develop Electrochemical Etch Stop process. For this purpose I'll
use Epi wafer (Substrate = P-type Si, [100], 500um thick, and Epi-layer =
N-type, 10um thick). I have also MEMS Potentiostat from "AMMT". I'll be
thankful if someone can provide information on it.

Thanks
--
Abdul Qader Ahsan
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