durusmail: mems-talk: Information on Electrochemical Etch Stop Process
Information on Electrochemical Etch Stop Process
Information on Electrochemical Etch Stop Process
André Bödecker
2014-11-17
Hello Abdul,

we have an older, simple type of the AMMT-Device for the electrochemical
etch stop process. I saw on AMMT's website that the menu is quite different
today. In principle, you have to contact your substrate as anode and the
counter electrode as cathode and then start the process. The end of the
etching is indicated by a sudden change of the current.

Regards
André

-----Ursprüngliche Nachricht-----
Von: mems-talk-bounces+aboedecker=imsas.uni-bremen.de@memsnet.org
[mailto:mems-talk-bounces+aboedecker=imsas.uni-bremen.de@memsnet.org] Im
Auftrag von Abdul Qader Ahsan Qureshi
Gesendet: Mittwoch, 12. November 2014 02:29
An: mems-talk@memsnet.org
Betreff: [mems-talk] Information on Electrochemical Etch Stop Process

Hello

I want to develop Electrochemical Etch Stop process. For this purpose I'll
use Epi wafer (Substrate = P-type Si, [100], 500um thick, and Epi-layer =
N-type, 10um thick). I have also MEMS Potentiostat from "AMMT". I'll be
thankful if someone can provide information on it.

Thanks
--
Abdul Qader Ahsan
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