Has anyone worked with the dry (or tape) photoresist sheets that acts as a mask for DRIE etches ? If so, could you please recommend a specific type for our backside through si etch ? We have fairly large features, 100umx100um windows that we'd like to etch through the wafer. Thanks, --Kris K. Vossough, Ph.D. Nano and Micro Technology Consultants E-mail: vossough@memswork.net Voice: (408)373-5413 Fax: (650)798-5001 MEMS and Nano Technology :: Nano and Micro Technology Consultants View on www.memswork.net _______________________________________________ Hosted by the MEMS and Nanotechnology Exchange, the country's leading provider of MEMS and Nanotechnology design and fabrication services. Visit us at http://www.mems-exchange.org Want to advertise to this community? See http://www.memsnet.org To unsubscribe: http://mail.mems-exchange.org/mailman/listinfo/mems-talk