Hello, You can use Kapton tape or AZ4562 resist. On Wed, Feb 25, 2015 at 7:11 AM, K.Vossoughwrote: > Has anyone worked with the dry (or tape) photoresist sheets that acts as a > mask for DRIE etches ? If so, could you please recommend a specific type > for our backside through si etch ? We have fairly large features, > 100umx100um windows that we'd like to etch through the wafer. > > Thanks, > > --Kris > > K. Vossough, Ph.D. > Nano and Micro Technology Consultants > E-mail: vossough@memswork.net > Voice: (408)373-5413 > Fax: (650)798-5001 > MEMS and Nano Technology :: Nano and Micro Technology Consultants > View on www.memswork.net > _______________________________________________ > Hosted by the MEMS and Nanotechnology Exchange, the country's leading > provider of MEMS and Nanotechnology design and fabrication services. > Visit us at http://www.mems-exchange.org > > Want to advertise to this community? See http://www.memsnet.org > > To unsubscribe: > http://mail.mems-exchange.org/mailman/listinfo/mems-talk > _______________________________________________ Hosted by the MEMS and Nanotechnology Exchange, the country's leading provider of MEMS and Nanotechnology design and fabrication services. Visit us at http://www.mems-exchange.org Want to advertise to this community? See http://www.memsnet.org To unsubscribe: http://mail.mems-exchange.org/mailman/listinfo/mems-talk