Hello Leily, holes in the glass wafers is one of the best ways to connect the microchannels. There are different techniques like drilling, ultrasonic drilling, laser and powder blasting. For getting enough fluid through the inlets they should have a width of several hundreds of µm. For doing powder blasting you can contact me: info@mems-tech.de Regards, André Bödecker -----Ursprüngliche Nachricht----- Von: mems-talk-bounces+aboedecker=imsas.uni-bremen.de@memsnet.org [mailto:mems-talk-bounces+aboedecker=imsas.uni-bremen.de@memsnet.org] Im Auftrag von Leily Majidi Gesendet: Mittwoch, 22. April 2015 00:21 An: mems-talk@memsnet.org Betreff: [mems-talk] Tips for fabrication of microchannel heat sinks Hello, For my project, I want to fabricate microchannels on silicon wafer and I need some help.I have a 4 inch silicon wafer and my channels are going to be etched on chips with the dimensions of 15 mm by 15 mm. The channels are 300 micron deep and the smallest width of channels is 50 microns. Another thing is that my coolant is a segmented glow containing liquid metal (Galinstan) and mineral oil, and Galinstan is corrosive to metals. I read in different literature that anodic bonding is used to cover the chip with glass. If I use the same process, how can I connect my inlet and outlet tubes to the chip to pump the coolant? Should I make holes on glass? I'd appreciate any help. Thank you Leily _______________________________________________ Hosted by the MEMS and Nanotechnology Exchange, the country's leading provider of MEMS and Nanotechnology design and fabrication services. Visit us at http://www.mems-exchange.org Want to advertise to this community? See http://www.memsnet.org To unsubscribe: http://mail.mems-exchange.org/mailman/listinfo/mems-talk _______________________________________________ Hosted by the MEMS and Nanotechnology Exchange, the country's leading provider of MEMS and Nanotechnology design and fabrication services. Visit us at http://www.mems-exchange.org Want to advertise to this community? See http://www.memsnet.org To unsubscribe: http://mail.mems-exchange.org/mailman/listinfo/mems-talk