Dear mems-talk community,
We are interested in e-beam evaporation of thick layers (from 6 microns up
to 16 microns) of SiO2.
We wonder if anybody from the mems-talk community have any experience with
such thick layers of SiO2 e-beam evaporation in terms of mechanical
properties such as Young's modulus and residual stress?

Based on the feedback from the mems-talk community we may decide to proceed
directly with our actual work, or do some preliminary experiments before we
start our actual work.

Sincerely,

Mehmet
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