durusmail: mems-talk: Selective etching or patterning of Parylene-n
Selective etching or patterning of Parylene-n
Selective etching or patterning of Parylene-n
Kaustubh.Gadre@asu.edu
1999-09-07
Hi,

I am working on Pa-n as a dielectric material. but cannot get any information
about
patterning or selective etching of it. Can anybody suggest any literature or
personal
contact?
Thnaks

Kaustubh Gadre


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