durusmail: mems-talk: Selective etching or patterning of Parylene-n
Selective etching or patterning of Parylene-n
Selective etching or patterning of Parylene-n
Kaustubh S. Gadre
1999-09-07
Hi,

I am working on Pa-n as a dielectric material. but cannot get any
information about patterning or selective etching of it. Can anybody
suggest any literature or personal contact?
Thnaks

Kaustubh Gadre
ASU


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