durusmail: mems-talk: Re: poly-Si
Re: poly-Si
1995-05-26
1995-05-26
Re: poly-Si
Wood
1995-05-26
Robert,

Surely the answer is 'it depends'. Polysilicon is a generic term applied

to a largely polycrystalline silicon structure (of variable and ill-defined
grain size) with various deliberate (e.g. doping) and unwanted (e.g. carrier
gas) additions. The mechanical and electrical properties will depend on
individual circumstances, purity of sources and equipment, method of
deposition, etc.

Dave Wood.

On Wed, 24 May 1995, robert s okojie ee stnt wrote:
> Dear colleagues,
>
> Please, could someone tell me what the Thermal Expansion Coeff. of
> Poly-Silicon is.
>
> References would also be appreciated.
>
> Thank you.
>
>
> Robert S. Okojie
> NJIT
>
>
>


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