While your argument of "it depends" is entirely accurate, surely Mr. Okojie could probably use whatever numbers you know of as an estimate, as that data on polysilicon is rather hard to come by. Even a range of measured or calculated values for the thermal expansion coef. for different grain sizes, doping levels, etc. would be useful to know. remember the joke, 'first assume a spherical horse'??? Or was that graduate level classical mechanics..... Shirley Kidner ---------------Included Message--------------- Date: Fri, 26 May 1995 11:35:18 +0100 (BST) From: WoodSubject: Re: poly-Si To: MEMS@ISI.EDU Robert, Surely the answer is 'it depends'. Polysilicon is a generic term applied to a largely polycrystalline silicon structure (of variable and ill-defined grain size) with various deliberate (e.g. doping) and unwanted (e.g. carrier gas) additions. The mechanical and electrical properties will depend on individual circumstances, purity of sources and equipment, method of deposition, etc. Dave Wood. On Wed, 24 May 1995, robert s okojie ee stnt wrote: > Dear colleagues, > Please, could someone tell me what the Thermal Expansion Coeff. of > Poly-Silicon is. > > References would also be appreciated. > > Thank you. > > > Robert S. Okojie > NJIT > > > ------------------------------------- Shirley Kidner 05/26/95 12:51:31 -------------------------------------