SIMODE is a suiteable tool for etching of Si using different
etchants. You can find detailed information on the homepage of GEMAC
(http://www.gemac-chemnitz.de) and there on the microsystem-page.

Regards

Andreas

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Dr. Andreas Ehrlich
Erwin Sick Engineering GmbH
Bergener Ring 43
D-01458 Ottendorf-Okrilla
GERMANY
Phone: (+49) 35205/524-42
Fax:   (+49) 35205/524-22
Email: ehrlicha@engineering.sick.de
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