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Phil Rayner

On 14 Apr 99, at 13:44, Kavita  Chandra wrote:

Date sent:              Wed, 14 Apr 1999 13:44:00 -0400
From:                   Kavita  Chandra 
Subject:                Simulation of KOH etch
To:                     MEMS@ISI.EDU
Send reply to:          Kavita  Chandra , mems-cc@ISI.EDU

>
> Does anybody has any information on a
> software that simulates KOH/EDP etch of
> silicon..(basically to get information
> on issues like corner compensation,
> under-cut).
>
> Thanks,
>
> Kavita Chandra
>