Ronny,

We make microdevices using aluminum structures including cantilever
structures.  We would be happy to give you a quote on building your
devices.  The method we use is to grow oxide on silicon, etch the oxide
to make openings, sputter aluminum and pattern and etch it.  Finally, we
etch the silicon that is exposed using XeF2 and it undercuts the
aluminum leaving cantilevers.

I hope this is of some help.

Nakash Ronen wrote:

> Dear collegues ,
>         Does any of you have information about micro Aluminum
> (or other metal) cantilevers manufacturing technique ?
> Any help or source of information will be gratefully accepted .
> My E-Mail is : mernrjl@techunix.technion.ac.il
>
>         Thanks ,
>                  Ronny N.
>



--
John R. Karpinsky  ---  Chief Physicist
MEMS Optical, Inc., 205 Import Circle, Huntsville, AL 35806
Tel: 256-859-1886  Fax: 256-859-5890  Email: johnk@memsoptical.com