polysilicon



It is 2.3 gr/cm^3. Same as for bulk.


On Mon, 19 Apr 1999, Dung-An Wang wrote:

> Dear MEMS people
> Could you tell me what the density of LPCVD polysilicon is ?
> I much appreciate that.
> Have a good day.
>
>
>
>    Sincerely,
>           Dung-An
>
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>