Dung-An, The density of Si is 2.33g/cm3. The density of poly-Si would depend on your process conditions (which in turn influence the dep rate). I do not have these correlations. Depending on your application, you might be able to approximate it to the density of Si. Hope this helps. Goodluck. Jaideep At 08:20 PM 4/19/99 -0400, you wrote: >Dear MEMS people >Could you tell me what the density of LPCVD polysilicon is ? >I much appreciate that. >Have a good day. > > > > Sincerely, > Dung-An > >Phone: > Office: (734) 615-0303 Home : (734) 662-1553 >Address: > Office: Home: > University of Michigan 411 Longshore Dr. > Department of Mechanical Engineering Ann Arbor, MI 48105 > 3007 EECS, 2350 Hayward U.S.A. > Ann Arbor, MI 48109-2125 > U.S.A. >E-Mail: > wangd@engin.umich.edu >Homepage: > http://www-personal.engin.umich.edu/~wangd > > > > >