Avi, You could use a non-contact setup like an equipment made by Quantox. It deposits a corona charge on the film and uses a Kelvin probe to measure the capacitance. If you already know the phyisical thickness, you can derive the dielectric constant. I am not sure if you would call this a true "physical measurement". Goodluck. Jaideep At 04:41 PM 4/21/99 -0700, you wrote: > Hello all, > > I am currently working with 15 micron thick, spin-on polyimide films. > The films are hard-baked following patterning. Since these films are > for a microwave/RF application (I'm fabricating tranmission lines on > the polyimide, substrate is Si), I'm interested in measuring the > dielectric constant and dielectric loss tangent for these films, > following the curing step. I would like to know the variation in > dielectric constant, loss tangent as a function of curing times, > temperatures, etc... > > As far as I know the easiest way to do this is to fabricate a > capacitor, with the polyimide as the dielectric and perform > measurements usings the C-V meter. > > An alternative approach is to fabricate transmission lines, measure > S-parameters, and extract the dielectric constant from the data... > > I'd be interested in performing an actual physical measurement, if > possible, rather than rely on a functional device/component... > > Any suggestions would be appreciated... > > Thanks, > > Avi Kane > Raytheon Systems Company > askane@west.raytheon.com > > >