To completely clean the wafer (free from Ag and K elements) after KOH etching perform the following cleaning sequence. 1) HCl:H2O2:H2O=1:1:6 (by Volume) 10min (boil) 2) DIW 3) HF 4) HCl:H2O2:H2O=1:1:6 (by Volume) 10min (boil) 5) DIW For moderate cleaning of KOH processed wafer, 1) NH4OH:H2O2:H2O=1:1:6 (by Volume) 10min (boil) 2) DIW 3) HF 4) DIW Hope this information could be of help. Best regards, Regan Nayve > > Date: Tue, 21 Aug 2001 09:02:00 -0700 (PDT) > From: shankar> To: mems-talk@memsnet.org > Subject: [mems-talk] cleaning after KOH etching > > could somebody please tell me the steps that should be followed for > cleaning the anisotropically etched wafer with KOH. i need to etch > V-grooves in (100) silicon wafer using KOH. > > THE MAN WHO DOES NOT READ GOOD BOOKS HAS NO ADVANTAGE > OVER THE MAN WHO CANNOT READ......... > **************************************************************************** > Ravi Shankar > Engineer VLSI-FAB, Phone: 91-172-254401 > Semiconductor Complex Ltd., Ext: 576,552. > Phase-VIII, S.A.S Nagar, Fax:91-172-253378 > Punjab. Pin:160059. E-mail: shankar@sclchd.ernet.in > > ****************************************************************************