Hi everybody, i am making some v-grooves in silicon, and with good suggestion form this discussion group,i was able to settle the cleaning problem after wet silicon etching. Now my problem is the UNDERCUT. Basically at convex edges i have problem that the feature instead of being right angled becomes rounded.i use KOH at 80 deg cel. for etching silicon. how do one take care of this effect? Regds Ravi Shankar Semiconductor Complex Ltd., India.