Hi all,

I am looking for a foundry that can perform deep reactive ion etching
(375 micron etch in 525 or 750 micron silicon wafers).  Ideally I am
looking for somewhere that can process four inch wafers.  Depending on
clean room constraints, I can supply patterned nitride on silicon wafers
for further processing or discuss our full process requirements with the
relevant fab.  Initially I am looking for a smalll number of wafers
(5-10) to prove a concept.

thanks,

Dr. Helen Berney
National Microelectronics Research Centre, LeeMaltings,Cork, Ireland.
Tel +353-21-4904010 Fax +353-21-4270271 Email hberney@nmrc.ie