Hi Connie, If you switch to <100> Si Wafers Your problem will go away. Ed Knighton, Process Engineer Constellation Technology Corp. > -----Original Message----- > From: Connie Kathleen Smith [SMTP:cksmith@ruf.rice.edu] > Sent: Friday, January 04, 2002 1:40 PM > To: mems-talk@memsnet.org > Subject: [mems-talk] 110 Si etching with 20%KOH > > I am trying to fabricate a flow channel with vertical side walls using a > <110> Si wafer. When I etch all the way through the wafer (which is > desired) the side walls are slanted. The wafers are coated with SiO2 and > Si3N4 as protective barriers during etching. I expected to lose several > microns vertically during etching but the slanted walls were unexpected. > > Thank you, > Connie Smith > Rice University > Department of Chemical Engineering > 6100 Main MS 362 > Houston, TX 77005 > _______________________________________________ > mems-talk@memsnet.org mailing list: to unsubscribe or change your list > options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk > Hosted by the MEMS Exchange, providers of MEMS processing services. > Visit us at http://www.mems-exchange.org/