Hi Connie, One of the people in my group uses DRIE to etch all the way through a <110> wafer, and then "polishes" the side walls using KOH. Depending on what sort of difficulties you're having this may help. Jesse Fowler UCLA/MAE Dept., 420 Westwood Plaza, Room 18-121, ENGR IV Los Angeles, CA 90095-1597 | (310)825-3977 "Rule #6: There is no rule #6" -- Monty Python "ARTICLE SIX: THIS ARTICLE IS ABOLISHED" -- Constitution of Afghanistan On Mon, 7 Jan 2002, Connie Kathleen Smith wrote: > >From literature and others' suggestions I was led to believe that to get > vertical walls I would have to use 110 Si wafers. The channel I am > etching is only about 200um wide and 500um deep. > > Connie Smith > Rice University > > > On Mon, 7 Jan 2002, Knighton, Ed wrote: > > > Hi Connie, If you switch to <100> Si Wafers Your problem will go away. > > > > Ed Knighton, Process Engineer > > Constellation Technology Corp. > > > > > -----Original Message----- > > > From: Connie Kathleen Smith [SMTP:cksmith@ruf.rice.edu] > > > Sent: Friday, January 04, 2002 1:40 PM > > > To: mems-talk@memsnet.org > > > Subject: [mems-talk] 110 Si etching with 20%KOH > > > > > > I am trying to fabricate a flow channel with vertical side walls using a > > > <110> Si wafer. When I etch all the way through the wafer (which is > > > desired) the side walls are slanted. The wafers are coated with SiO2 and > > > Si3N4 as protective barriers during etching. I expected to lose several > > > microns vertically during etching but the slanted walls were unexpected. > > > > > > Thank you, > > > Connie Smith > > > Rice University > > > Department of Chemical Engineering > > > 6100 Main MS 362 > > > Houston, TX 77005 > > > _______________________________________________ > > > mems-talk@memsnet.org mailing list: to unsubscribe or change your list > > > options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk > > > Hosted by the MEMS Exchange, providers of MEMS processing services. > > > Visit us at http://www.mems-exchange.org/ > > _______________________________________________ > > mems-talk@memsnet.org mailing list: to unsubscribe or change your list > > options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk > > Hosted by the MEMS Exchange, providers of MEMS processing services. > > Visit us at http://www.mems-exchange.org/ > _______________________________________________ > mems-talk@memsnet.org mailing list: to unsubscribe or change your list > options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk > Hosted by the MEMS Exchange, providers of MEMS processing services. > Visit us at http://www.mems-exchange.org/