Hi Nickolay, Anodic Bonding will work if you first oxide the nitride wafer. Voltage should be higher than 750V and temperature close to 400 degrees Greets, Heiko van der Linden ******************************* MESA+ Research Institute Twente University P.O. Box 217 7500 AE Enschede The Netherlands ******************************* -----Original Message----- From: mems-talk-admin@memsnet.org [mailto:mems-talk-admin@memsnet.org] On Behalf Of Nickolay V. Lavrik Sent: Wednesday, January 09, 2002 9:08 PM To: mems-talk@memsnet.org Subject: [mems-talk] nitride to Si bonding? I know that standard bonding processes are available for materials such as Si, oxide and pyrex. Does any one if similar procedures exist for reliable (without organic adhesives) permanent bonding of Si and nitride coated wafers. Any relevant information will be highly appreciated Nickolay _______________________________________________ mems-talk@memsnet.org mailing list: to unsubscribe or change your list options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk Hosted by the MEMS Exchange, providers of MEMS processing services. Visit us at http://www.mems-exchange.org/